Pure and Applied Chemistry

Abstract: Plasma polymerization covers a broad range of plasma deposits from soft to hard coatings. Nanoscale coatings are formed within a dry and eco-friendly process on different substrate materials and structures. To gain a deeper insight into plasma polymerization, a macroscopic approach using the concept of chemical quasi-equilibria might be useful. Following this macroscopic approach, the reaction parameter power input per gas flow W/F, which represents the specific energy invested per particle within the active plasma zone, solely determines the mass deposition rate. Hence, plasma polymerization can be described by measuring the deposited mass and examining the power input and gas flow which contributes to it. Thus, the control, investigation, and up-scaling of plasma polymerization processes are enabled. Different examples are given to make use of the macroscopic approach.